6/20/2012	9:13:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2012	9:13:42 AM	Recipe started at 9:13 AM
6/20/2012	9:13:42 AM	Helium valve closed
6/20/2012	9:13:42 AM	H2 valve closed
6/20/2012	9:13:42 AM	BCl3 valve closed
6/20/2012	9:13:42 AM	PH3 valve closed
6/20/2012	9:13:42 AM	SiCl4 pre valve closed
6/20/2012	9:13:42 AM	SiCl4 post valve closed
6/20/2012	9:13:42 AM	Main Vac valve closed
6/20/2012	9:13:42 AM	Bypass valve closed
6/20/2012	9:13:42 AM	Bubbler valve closed
6/20/2012	9:13:42 AM	Helium MFC set to  0.000000
6/20/2012	9:13:42 AM	H2 MFC set to  0.000000
6/20/2012	9:13:42 AM	BCl3 MFC set to  0.000000
6/20/2012	9:13:42 AM	PH3 MFC set to  0.000000
6/20/2012	9:13:42 AM	SiCl4 MFC set to  0.000000
6/20/2012	9:13:42 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	9:13:42 AM	Tube furnace set to 0
6/20/2012	9:13:45 AM	H2 valve closed
6/20/2012	9:13:45 AM	BCl3 valve closed
6/20/2012	9:13:45 AM	PH3 valve closed
6/20/2012	9:13:45 AM	SiCl4 pre valve closed
6/20/2012	9:13:45 AM	SiCl4 post valve closed
6/20/2012	9:13:45 AM	Main Vac valve closed
6/20/2012	9:13:45 AM	Bypass valve closed
6/20/2012	9:13:45 AM	Bubbler valve closed
6/20/2012	9:13:45 AM	Helium valve opened
6/20/2012	9:13:45 AM	Helium MFC set to  500.000000
6/20/2012	9:13:45 AM	H2 MFC set to  0.000000
6/20/2012	9:13:45 AM	BCl3 MFC set to  0.000000
6/20/2012	9:13:45 AM	PH3 MFC set to  0.000000
6/20/2012	9:13:45 AM	SiCl4 MFC set to  0.000000
6/20/2012	9:13:45 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	9:13:45 AM	Tube furnace set to 0
6/20/2012	9:14:58 AM	Helium valve closed
6/20/2012	9:14:58 AM	H2 valve closed
6/20/2012	9:14:58 AM	BCl3 valve closed
6/20/2012	9:14:58 AM	PH3 valve closed
6/20/2012	9:14:58 AM	SiCl4 pre valve closed
6/20/2012	9:14:58 AM	SiCl4 post valve closed
6/20/2012	9:14:58 AM	Main Vac valve closed
6/20/2012	9:14:58 AM	Bypass valve closed
6/20/2012	9:14:58 AM	Bubbler valve closed
6/20/2012	9:14:58 AM	Helium MFC set to  0.000000
6/20/2012	9:14:58 AM	H2 MFC set to  0.000000
6/20/2012	9:14:58 AM	BCl3 MFC set to  0.000000
6/20/2012	9:14:58 AM	PH3 MFC set to  0.000000
6/20/2012	9:14:58 AM	SiCl4 MFC set to  0.000000
6/20/2012	9:14:58 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	9:14:58 AM	Tube furnace set to 0
6/20/2012	9:14:59 AM	Run finished at 9:14 AM
6/20/2012	9:14:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2012	9:25:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/20/2012	9:25:02 AM	Recipe started at 9:25 AM
6/20/2012	9:25:02 AM	Helium valve closed
6/20/2012	9:25:02 AM	H2 valve closed
6/20/2012	9:25:02 AM	BCl3 valve closed
6/20/2012	9:25:02 AM	PH3 valve closed
6/20/2012	9:25:02 AM	SiCl4 pre valve closed
6/20/2012	9:25:02 AM	SiCl4 post valve closed
6/20/2012	9:25:02 AM	Main Vac valve closed
6/20/2012	9:25:02 AM	Bubbler valve closed
6/20/2012	9:25:02 AM	Bypass valve opened
6/20/2012	9:25:02 AM	Helium MFC set to  0.000000
6/20/2012	9:25:02 AM	H2 MFC set to  0.000000
6/20/2012	9:25:02 AM	BCl3 MFC set to  0.000000
6/20/2012	9:25:02 AM	PH3 MFC set to  0.000000
6/20/2012	9:25:02 AM	SiCl4 MFC set to  0.000000
6/20/2012	9:25:02 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	9:25:02 AM	Tube furnace set to 0
6/20/2012	9:26:12 AM	Helium valve closed
6/20/2012	9:26:12 AM	H2 valve closed
6/20/2012	9:26:12 AM	BCl3 valve closed
6/20/2012	9:26:12 AM	PH3 valve closed
6/20/2012	9:26:12 AM	SiCl4 pre valve closed
6/20/2012	9:26:12 AM	SiCl4 post valve closed
6/20/2012	9:26:12 AM	Main Vac valve closed
6/20/2012	9:26:12 AM	Bubbler valve closed
6/20/2012	9:26:12 AM	Bypass valve opened
6/20/2012	9:26:12 AM	Helium MFC set to  0.000000
6/20/2012	9:26:12 AM	H2 MFC set to  0.000000
6/20/2012	9:26:12 AM	BCl3 MFC set to  0.000000
6/20/2012	9:26:13 AM	PH3 MFC set to  0.000000
6/20/2012	9:26:13 AM	SiCl4 MFC set to  0.000000
6/20/2012	9:26:13 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	9:26:13 AM	Tube furnace set to 0
6/20/2012	9:27:13 AM	Helium valve closed
6/20/2012	9:27:13 AM	H2 valve closed
6/20/2012	9:27:13 AM	BCl3 valve closed
6/20/2012	9:27:13 AM	PH3 valve closed
6/20/2012	9:27:13 AM	SiCl4 pre valve closed
6/20/2012	9:27:13 AM	SiCl4 post valve closed
6/20/2012	9:27:13 AM	Bypass valve closed
6/20/2012	9:27:13 AM	Bubbler valve closed
6/20/2012	9:27:13 AM	Main Vac valve opened
6/20/2012	9:27:13 AM	Helium MFC set to  0.000000
6/20/2012	9:27:13 AM	H2 MFC set to  0.000000
6/20/2012	9:27:13 AM	BCl3 MFC set to  0.000000
6/20/2012	9:27:13 AM	PH3 MFC set to  0.000000
6/20/2012	9:27:13 AM	SiCl4 MFC set to  0.000000
6/20/2012	9:27:13 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	9:27:13 AM	Tube furnace set to 0
6/20/2012	9:27:14 AM	Run finished at 9:27 AM
6/20/2012	9:27:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/20/2012	10:58:06 AM	Main Vac valve closed
6/20/2012	10:58:17 AM	Main Vac valve opened
6/20/2012	11:00:18 AM	Recipe started at 11:00 AM
6/20/2012	11:00:18 AM	Helium valve closed
6/20/2012	11:00:18 AM	H2 valve closed
6/20/2012	11:00:18 AM	BCl3 valve closed
6/20/2012	11:00:18 AM	PH3 valve closed
6/20/2012	11:00:18 AM	SiCl4 pre valve closed
6/20/2012	11:00:18 AM	SiCl4 post valve closed
6/20/2012	11:00:18 AM	Bypass valve closed
6/20/2012	11:00:18 AM	Bubbler valve closed
6/20/2012	11:00:18 AM	Main Vac valve opened
6/20/2012	11:00:18 AM	Helium MFC set to  0.000000
6/20/2012	11:00:18 AM	H2 MFC set to  0.000000
6/20/2012	11:00:18 AM	BCl3 MFC set to  0.000000
6/20/2012	11:00:18 AM	PH3 MFC set to  0.000000
6/20/2012	11:00:18 AM	SiCl4 MFC set to  0.000000
6/20/2012	11:00:18 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	11:00:18 AM	Tube furnace set to 0
6/20/2012	11:00:21 AM	Helium valve closed
6/20/2012	11:00:21 AM	H2 valve closed
6/20/2012	11:00:21 AM	BCl3 valve closed
6/20/2012	11:00:21 AM	PH3 valve closed
6/20/2012	11:00:21 AM	SiCl4 pre valve closed
6/20/2012	11:00:21 AM	SiCl4 post valve closed
6/20/2012	11:00:21 AM	Main Vac valve closed
6/20/2012	11:00:21 AM	Bypass valve closed
6/20/2012	11:00:21 AM	Bubbler valve closed
6/20/2012	11:00:21 AM	Helium MFC set to  0.000000
6/20/2012	11:00:21 AM	H2 MFC set to  0.000000
6/20/2012	11:00:21 AM	BCl3 MFC set to  0.000000
6/20/2012	11:00:21 AM	PH3 MFC set to  0.000000
6/20/2012	11:00:21 AM	SiCl4 MFC set to  0.000000
6/20/2012	11:00:21 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	11:00:21 AM	Tube furnace set to 0
6/20/2012	11:00:24 AM	Helium valve closed
6/20/2012	11:00:24 AM	BCl3 valve closed
6/20/2012	11:00:24 AM	PH3 valve closed
6/20/2012	11:00:24 AM	SiCl4 pre valve closed
6/20/2012	11:00:24 AM	SiCl4 post valve closed
6/20/2012	11:00:24 AM	Main Vac valve closed
6/20/2012	11:00:24 AM	Bypass valve closed
6/20/2012	11:00:24 AM	Bubbler valve closed
6/20/2012	11:00:24 AM	H2 valve opened
6/20/2012	11:00:24 AM	Helium MFC set to  0.000000
6/20/2012	11:00:24 AM	H2 MFC set to  500.000000
6/20/2012	11:00:24 AM	BCl3 MFC set to  0.000000
6/20/2012	11:00:24 AM	PH3 MFC set to  0.000000
6/20/2012	11:00:24 AM	SiCl4 MFC set to  0.000000
6/20/2012	11:00:24 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	11:00:24 AM	Tube furnace set to 0
6/20/2012	11:01:40 AM	Helium valve closed
6/20/2012	11:01:40 AM	BCl3 valve closed
6/20/2012	11:01:40 AM	PH3 valve closed
6/20/2012	11:01:40 AM	SiCl4 pre valve closed
6/20/2012	11:01:40 AM	SiCl4 post valve closed
6/20/2012	11:01:40 AM	Main Vac valve closed
6/20/2012	11:01:40 AM	Bypass valve closed
6/20/2012	11:01:40 AM	H2 valve opened
6/20/2012	11:01:40 AM	Bubbler valve opened
6/20/2012	11:01:40 AM	Helium MFC set to  0.000000
6/20/2012	11:01:40 AM	H2 MFC set to  500.000000
6/20/2012	11:01:40 AM	BCl3 MFC set to  0.000000
6/20/2012	11:01:40 AM	PH3 MFC set to  0.000000
6/20/2012	11:01:40 AM	SiCl4 MFC set to  0.000000
6/20/2012	11:01:40 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	11:01:40 AM	Tube furnace set to 0
6/20/2012	11:01:41 AM	Helium valve closed
6/20/2012	11:01:41 AM	BCl3 valve closed
6/20/2012	11:01:41 AM	PH3 valve closed
6/20/2012	11:01:41 AM	SiCl4 pre valve closed
6/20/2012	11:01:41 AM	SiCl4 post valve closed
6/20/2012	11:01:41 AM	Main Vac valve closed
6/20/2012	11:01:41 AM	Bypass valve closed
6/20/2012	11:01:41 AM	H2 valve opened
6/20/2012	11:01:41 AM	Bubbler valve opened
6/20/2012	11:01:41 AM	Helium MFC set to  0.000000
6/20/2012	11:01:41 AM	H2 MFC set to  500.000000
6/20/2012	11:01:41 AM	BCl3 MFC set to  0.000000
6/20/2012	11:01:41 AM	PH3 MFC set to  0.000000
6/20/2012	11:01:41 AM	SiCl4 MFC set to  0.000000
6/20/2012	11:01:41 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	11:01:42 AM	Tube furnace set to 1000
6/20/2012	11:26:42 AM	Helium valve closed
6/20/2012	11:26:42 AM	PH3 valve closed
6/20/2012	11:26:42 AM	Main Vac valve closed
6/20/2012	11:26:42 AM	Bypass valve closed
6/20/2012	11:26:42 AM	H2 valve opened
6/20/2012	11:26:42 AM	BCl3 valve opened
6/20/2012	11:26:42 AM	SiCl4 pre valve opened
6/20/2012	11:26:42 AM	SiCl4 post valve opened
6/20/2012	11:26:42 AM	Bubbler valve opened
6/20/2012	11:26:42 AM	Helium MFC set to  0.000000
6/20/2012	11:26:42 AM	H2 MFC set to  450.000000
6/20/2012	11:26:42 AM	BCl3 MFC set to  1.000000
6/20/2012	11:26:42 AM	PH3 MFC set to  0.000000
6/20/2012	11:26:42 AM	SiCl4 MFC set to  50.000000
6/20/2012	11:26:42 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	11:26:42 AM	Tube furnace set to 1000
6/20/2012	11:41:12 AM	Helium valve closed
6/20/2012	11:41:12 AM	BCl3 valve closed
6/20/2012	11:41:12 AM	Main Vac valve closed
6/20/2012	11:41:12 AM	Bypass valve closed
6/20/2012	11:41:12 AM	H2 valve opened
6/20/2012	11:41:12 AM	PH3 valve opened
6/20/2012	11:41:12 AM	SiCl4 pre valve opened
6/20/2012	11:41:12 AM	SiCl4 post valve opened
6/20/2012	11:41:12 AM	Bubbler valve opened
6/20/2012	11:41:12 AM	Helium MFC set to  0.000000
6/20/2012	11:41:12 AM	H2 MFC set to  445.000000
6/20/2012	11:41:12 AM	BCl3 MFC set to  0.000000
6/20/2012	11:41:12 AM	PH3 MFC set to  5.000000
6/20/2012	11:41:12 AM	SiCl4 MFC set to  50.000000
6/20/2012	11:41:12 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	11:41:12 AM	Tube furnace set to 1000
6/20/2012	11:55:42 AM	Helium valve closed
6/20/2012	11:55:42 AM	BCl3 valve closed
6/20/2012	11:55:42 AM	PH3 valve closed
6/20/2012	11:55:42 AM	SiCl4 pre valve closed
6/20/2012	11:55:42 AM	SiCl4 post valve closed
6/20/2012	11:55:42 AM	Main Vac valve closed
6/20/2012	11:55:42 AM	Bypass valve closed
6/20/2012	11:55:42 AM	H2 valve opened
6/20/2012	11:55:42 AM	Bubbler valve opened
6/20/2012	11:55:42 AM	Helium MFC set to  0.000000
6/20/2012	11:55:42 AM	H2 MFC set to  500.000000
6/20/2012	11:55:42 AM	BCl3 MFC set to  0.000000
6/20/2012	11:55:42 AM	PH3 MFC set to  0.000000
6/20/2012	11:55:42 AM	SiCl4 MFC set to  0.000000
6/20/2012	11:55:42 AM	Bypass solenoid MFC set to  0.000000
6/20/2012	11:55:42 AM	Tube furnace set to 750
6/20/2012	12:10:42 PM	H2 valve closed
6/20/2012	12:10:42 PM	BCl3 valve closed
6/20/2012	12:10:42 PM	PH3 valve closed
6/20/2012	12:10:42 PM	SiCl4 pre valve closed
6/20/2012	12:10:42 PM	SiCl4 post valve closed
6/20/2012	12:10:42 PM	Main Vac valve closed
6/20/2012	12:10:42 PM	Bypass valve closed
6/20/2012	12:10:42 PM	Helium valve opened
6/20/2012	12:10:42 PM	Bubbler valve opened
6/20/2012	12:10:42 PM	Helium MFC set to  500.000000
6/20/2012	12:10:42 PM	H2 MFC set to  0.000000
6/20/2012	12:10:42 PM	BCl3 MFC set to  0.000000
6/20/2012	12:10:42 PM	PH3 MFC set to  0.000000
6/20/2012	12:10:42 PM	SiCl4 MFC set to  0.000000
6/20/2012	12:10:42 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	12:10:42 PM	Tube furnace set to 0
6/20/2012	12:30:42 PM	Helium valve closed
6/20/2012	12:30:42 PM	H2 valve closed
6/20/2012	12:30:42 PM	BCl3 valve closed
6/20/2012	12:30:42 PM	PH3 valve closed
6/20/2012	12:30:42 PM	SiCl4 pre valve closed
6/20/2012	12:30:42 PM	SiCl4 post valve closed
6/20/2012	12:30:42 PM	Main Vac valve closed
6/20/2012	12:30:42 PM	Bypass valve closed
6/20/2012	12:30:42 PM	Bubbler valve closed
6/20/2012	12:30:42 PM	Helium MFC set to  0.000000
6/20/2012	12:30:42 PM	H2 MFC set to  0.000000
6/20/2012	12:30:42 PM	BCl3 MFC set to  0.000000
6/20/2012	12:30:42 PM	PH3 MFC set to  0.000000
6/20/2012	12:30:42 PM	SiCl4 MFC set to  0.000000
6/20/2012	12:30:42 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	12:30:42 PM	Tube furnace set to 0
6/20/2012	12:50:42 PM	Helium valve closed
6/20/2012	12:50:42 PM	H2 valve closed
6/20/2012	12:50:42 PM	BCl3 valve closed
6/20/2012	12:50:42 PM	PH3 valve closed
6/20/2012	12:50:42 PM	SiCl4 pre valve closed
6/20/2012	12:50:42 PM	SiCl4 post valve closed
6/20/2012	12:50:42 PM	Main Vac valve closed
6/20/2012	12:50:42 PM	Bubbler valve closed
6/20/2012	12:50:42 PM	Bypass valve opened
6/20/2012	12:50:42 PM	Helium MFC set to  0.000000
6/20/2012	12:50:42 PM	H2 MFC set to  0.000000
6/20/2012	12:50:42 PM	BCl3 MFC set to  0.000000
6/20/2012	12:50:42 PM	PH3 MFC set to  0.000000
6/20/2012	12:50:42 PM	SiCl4 MFC set to  0.000000
6/20/2012	12:50:43 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	12:50:43 PM	Tube furnace set to 0
6/20/2012	12:51:34 PM	Helium valve closed
6/20/2012	12:51:34 PM	H2 valve closed
6/20/2012	12:51:34 PM	BCl3 valve closed
6/20/2012	12:51:34 PM	PH3 valve closed
6/20/2012	12:51:34 PM	SiCl4 pre valve closed
6/20/2012	12:51:34 PM	SiCl4 post valve closed
6/20/2012	12:51:34 PM	Main Vac valve closed
6/20/2012	12:51:34 PM	Bubbler valve closed
6/20/2012	12:51:34 PM	Bypass valve opened
6/20/2012	12:51:34 PM	Helium MFC set to  0.000000
6/20/2012	12:51:34 PM	H2 MFC set to  0.000000
6/20/2012	12:51:34 PM	BCl3 MFC set to  0.000000
6/20/2012	12:51:34 PM	PH3 MFC set to  0.000000
6/20/2012	12:51:34 PM	SiCl4 MFC set to  0.000000
6/20/2012	12:51:34 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	12:51:34 PM	Tube furnace set to 0
6/20/2012	12:52:34 PM	Helium valve closed
6/20/2012	12:52:34 PM	H2 valve closed
6/20/2012	12:52:34 PM	BCl3 valve closed
6/20/2012	12:52:34 PM	PH3 valve closed
6/20/2012	12:52:34 PM	SiCl4 pre valve closed
6/20/2012	12:52:34 PM	SiCl4 post valve closed
6/20/2012	12:52:34 PM	Bypass valve closed
6/20/2012	12:52:34 PM	Bubbler valve closed
6/20/2012	12:52:34 PM	Main Vac valve opened
6/20/2012	12:52:34 PM	Helium MFC set to  0.000000
6/20/2012	12:52:34 PM	H2 MFC set to  0.000000
6/20/2012	12:52:34 PM	BCl3 MFC set to  0.000000
6/20/2012	12:52:34 PM	PH3 MFC set to  0.000000
6/20/2012	12:52:34 PM	SiCl4 MFC set to  0.000000
6/20/2012	12:52:34 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	12:52:35 PM	Tube furnace set to 0
6/20/2012	1:03:14 PM	Run finished at 1:03 PM
6/20/2012	1:03:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2012	1:03:24 PM	Recipe started at 1:03 PM
6/20/2012	1:03:24 PM	Helium valve closed
6/20/2012	1:03:24 PM	H2 valve closed
6/20/2012	1:03:24 PM	BCl3 valve closed
6/20/2012	1:03:24 PM	PH3 valve closed
6/20/2012	1:03:24 PM	SiCl4 pre valve closed
6/20/2012	1:03:24 PM	SiCl4 post valve closed
6/20/2012	1:03:24 PM	Main Vac valve closed
6/20/2012	1:03:24 PM	Bypass valve closed
6/20/2012	1:03:24 PM	Bubbler valve closed
6/20/2012	1:03:24 PM	Helium MFC set to  0.000000
6/20/2012	1:03:24 PM	H2 MFC set to  0.000000
6/20/2012	1:03:24 PM	BCl3 MFC set to  0.000000
6/20/2012	1:03:24 PM	PH3 MFC set to  0.000000
6/20/2012	1:03:24 PM	SiCl4 MFC set to  0.000000
6/20/2012	1:03:24 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	1:03:25 PM	Tube furnace set to 0
6/20/2012	1:03:28 PM	H2 valve closed
6/20/2012	1:03:28 PM	BCl3 valve closed
6/20/2012	1:03:28 PM	PH3 valve closed
6/20/2012	1:03:28 PM	SiCl4 pre valve closed
6/20/2012	1:03:28 PM	SiCl4 post valve closed
6/20/2012	1:03:28 PM	Main Vac valve closed
6/20/2012	1:03:28 PM	Bypass valve closed
6/20/2012	1:03:28 PM	Bubbler valve closed
6/20/2012	1:03:28 PM	Helium valve opened
6/20/2012	1:03:28 PM	Helium MFC set to  500.000000
6/20/2012	1:03:28 PM	H2 MFC set to  0.000000
6/20/2012	1:03:28 PM	BCl3 MFC set to  0.000000
6/20/2012	1:03:28 PM	PH3 MFC set to  0.000000
6/20/2012	1:03:28 PM	SiCl4 MFC set to  0.000000
6/20/2012	1:03:28 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	1:03:28 PM	Tube furnace set to 0
6/20/2012	1:04:37 PM	Helium valve closed
6/20/2012	1:04:37 PM	H2 valve closed
6/20/2012	1:04:37 PM	BCl3 valve closed
6/20/2012	1:04:37 PM	PH3 valve closed
6/20/2012	1:04:37 PM	SiCl4 pre valve closed
6/20/2012	1:04:37 PM	SiCl4 post valve closed
6/20/2012	1:04:37 PM	Main Vac valve closed
6/20/2012	1:04:37 PM	Bypass valve closed
6/20/2012	1:04:37 PM	Bubbler valve closed
6/20/2012	1:04:37 PM	Helium MFC set to  0.000000
6/20/2012	1:04:37 PM	H2 MFC set to  0.000000
6/20/2012	1:04:37 PM	BCl3 MFC set to  0.000000
6/20/2012	1:04:37 PM	PH3 MFC set to  0.000000
6/20/2012	1:04:37 PM	SiCl4 MFC set to  0.000000
6/20/2012	1:04:37 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	1:04:38 PM	Tube furnace set to 0
6/20/2012	1:04:39 PM	Run finished at 1:04 PM
6/20/2012	1:04:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2012	1:54:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/20/2012	1:54:54 PM	Recipe started at 1:54 PM
6/20/2012	1:54:54 PM	Helium valve closed
6/20/2012	1:54:54 PM	H2 valve closed
6/20/2012	1:54:54 PM	BCl3 valve closed
6/20/2012	1:54:54 PM	PH3 valve closed
6/20/2012	1:54:54 PM	SiCl4 pre valve closed
6/20/2012	1:54:54 PM	SiCl4 post valve closed
6/20/2012	1:54:54 PM	Main Vac valve closed
6/20/2012	1:54:54 PM	Bubbler valve closed
6/20/2012	1:54:54 PM	Bypass valve opened
6/20/2012	1:54:54 PM	Helium MFC set to  0.000000
6/20/2012	1:54:54 PM	H2 MFC set to  0.000000
6/20/2012	1:54:54 PM	BCl3 MFC set to  0.000000
6/20/2012	1:54:54 PM	PH3 MFC set to  0.000000
6/20/2012	1:54:54 PM	SiCl4 MFC set to  0.000000
6/20/2012	1:54:54 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	1:54:54 PM	Tube furnace set to 0
6/20/2012	1:56:15 PM	Helium valve closed
6/20/2012	1:56:15 PM	H2 valve closed
6/20/2012	1:56:15 PM	BCl3 valve closed
6/20/2012	1:56:15 PM	PH3 valve closed
6/20/2012	1:56:15 PM	SiCl4 pre valve closed
6/20/2012	1:56:15 PM	SiCl4 post valve closed
6/20/2012	1:56:15 PM	Main Vac valve closed
6/20/2012	1:56:15 PM	Bubbler valve closed
6/20/2012	1:56:15 PM	Bypass valve opened
6/20/2012	1:56:15 PM	Helium MFC set to  0.000000
6/20/2012	1:56:15 PM	H2 MFC set to  0.000000
6/20/2012	1:56:15 PM	BCl3 MFC set to  0.000000
6/20/2012	1:56:15 PM	PH3 MFC set to  0.000000
6/20/2012	1:56:15 PM	SiCl4 MFC set to  0.000000
6/20/2012	1:56:15 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	1:56:15 PM	Tube furnace set to 0
6/20/2012	1:57:15 PM	Helium valve closed
6/20/2012	1:57:15 PM	H2 valve closed
6/20/2012	1:57:15 PM	BCl3 valve closed
6/20/2012	1:57:15 PM	PH3 valve closed
6/20/2012	1:57:15 PM	SiCl4 pre valve closed
6/20/2012	1:57:15 PM	SiCl4 post valve closed
6/20/2012	1:57:15 PM	Bypass valve closed
6/20/2012	1:57:15 PM	Bubbler valve closed
6/20/2012	1:57:15 PM	Main Vac valve opened
6/20/2012	1:57:15 PM	Helium MFC set to  0.000000
6/20/2012	1:57:15 PM	H2 MFC set to  0.000000
6/20/2012	1:57:15 PM	BCl3 MFC set to  0.000000
6/20/2012	1:57:15 PM	PH3 MFC set to  0.000000
6/20/2012	1:57:15 PM	SiCl4 MFC set to  0.000000
6/20/2012	1:57:15 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	1:57:15 PM	Tube furnace set to 0
6/20/2012	1:57:16 PM	Run finished at 1:57 PM
6/20/2012	1:57:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/20/2012	3:29:27 PM	Main Vac valve closed
6/20/2012	3:29:39 PM	Main Vac valve opened
6/20/2012	3:30:12 PM	Recipe started at 3:30 PM
6/20/2012	3:30:12 PM	Helium valve closed
6/20/2012	3:30:12 PM	H2 valve closed
6/20/2012	3:30:12 PM	BCl3 valve closed
6/20/2012	3:30:12 PM	PH3 valve closed
6/20/2012	3:30:12 PM	SiCl4 pre valve closed
6/20/2012	3:30:12 PM	SiCl4 post valve closed
6/20/2012	3:30:12 PM	Bypass valve closed
6/20/2012	3:30:12 PM	Bubbler valve closed
6/20/2012	3:30:12 PM	Main Vac valve opened
6/20/2012	3:30:12 PM	Helium MFC set to  0.000000
6/20/2012	3:30:12 PM	H2 MFC set to  0.000000
6/20/2012	3:30:12 PM	BCl3 MFC set to  0.000000
6/20/2012	3:30:12 PM	PH3 MFC set to  0.000000
6/20/2012	3:30:12 PM	SiCl4 MFC set to  0.000000
6/20/2012	3:30:12 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	3:30:12 PM	Tube furnace set to 0
6/20/2012	3:30:15 PM	Helium valve closed
6/20/2012	3:30:15 PM	H2 valve closed
6/20/2012	3:30:15 PM	BCl3 valve closed
6/20/2012	3:30:15 PM	PH3 valve closed
6/20/2012	3:30:15 PM	SiCl4 pre valve closed
6/20/2012	3:30:15 PM	SiCl4 post valve closed
6/20/2012	3:30:15 PM	Main Vac valve closed
6/20/2012	3:30:15 PM	Bypass valve closed
6/20/2012	3:30:15 PM	Bubbler valve closed
6/20/2012	3:30:15 PM	Helium MFC set to  0.000000
6/20/2012	3:30:15 PM	H2 MFC set to  0.000000
6/20/2012	3:30:15 PM	BCl3 MFC set to  0.000000
6/20/2012	3:30:15 PM	PH3 MFC set to  0.000000
6/20/2012	3:30:15 PM	SiCl4 MFC set to  0.000000
6/20/2012	3:30:15 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	3:30:15 PM	Tube furnace set to 0
6/20/2012	3:30:18 PM	Helium valve closed
6/20/2012	3:30:18 PM	BCl3 valve closed
6/20/2012	3:30:18 PM	PH3 valve closed
6/20/2012	3:30:18 PM	SiCl4 pre valve closed
6/20/2012	3:30:18 PM	SiCl4 post valve closed
6/20/2012	3:30:18 PM	Main Vac valve closed
6/20/2012	3:30:18 PM	Bypass valve closed
6/20/2012	3:30:18 PM	Bubbler valve closed
6/20/2012	3:30:18 PM	H2 valve opened
6/20/2012	3:30:18 PM	Helium MFC set to  0.000000
6/20/2012	3:30:18 PM	H2 MFC set to  500.000000
6/20/2012	3:30:18 PM	BCl3 MFC set to  0.000000
6/20/2012	3:30:18 PM	PH3 MFC set to  0.000000
6/20/2012	3:30:18 PM	SiCl4 MFC set to  0.000000
6/20/2012	3:30:18 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	3:30:19 PM	Tube furnace set to 0
6/20/2012	3:31:34 PM	Helium valve closed
6/20/2012	3:31:34 PM	BCl3 valve closed
6/20/2012	3:31:34 PM	PH3 valve closed
6/20/2012	3:31:34 PM	SiCl4 pre valve closed
6/20/2012	3:31:34 PM	SiCl4 post valve closed
6/20/2012	3:31:34 PM	Main Vac valve closed
6/20/2012	3:31:34 PM	Bypass valve closed
6/20/2012	3:31:34 PM	H2 valve opened
6/20/2012	3:31:34 PM	Bubbler valve opened
6/20/2012	3:31:34 PM	Helium MFC set to  0.000000
6/20/2012	3:31:34 PM	H2 MFC set to  500.000000
6/20/2012	3:31:34 PM	BCl3 MFC set to  0.000000
6/20/2012	3:31:34 PM	PH3 MFC set to  0.000000
6/20/2012	3:31:34 PM	SiCl4 MFC set to  0.000000
6/20/2012	3:31:34 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	3:31:34 PM	Tube furnace set to 0
6/20/2012	3:31:35 PM	Helium valve closed
6/20/2012	3:31:35 PM	BCl3 valve closed
6/20/2012	3:31:35 PM	PH3 valve closed
6/20/2012	3:31:35 PM	SiCl4 pre valve closed
6/20/2012	3:31:35 PM	SiCl4 post valve closed
6/20/2012	3:31:35 PM	Main Vac valve closed
6/20/2012	3:31:35 PM	Bypass valve closed
6/20/2012	3:31:35 PM	H2 valve opened
6/20/2012	3:31:35 PM	Bubbler valve opened
6/20/2012	3:31:35 PM	Helium MFC set to  0.000000
6/20/2012	3:31:35 PM	H2 MFC set to  500.000000
6/20/2012	3:31:35 PM	BCl3 MFC set to  0.000000
6/20/2012	3:31:35 PM	PH3 MFC set to  0.000000
6/20/2012	3:31:35 PM	SiCl4 MFC set to  0.000000
6/20/2012	3:31:35 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	3:31:35 PM	Tube furnace set to 1000
6/20/2012	3:56:35 PM	Helium valve closed
6/20/2012	3:56:35 PM	PH3 valve closed
6/20/2012	3:56:35 PM	Main Vac valve closed
6/20/2012	3:56:35 PM	Bypass valve closed
6/20/2012	3:56:35 PM	H2 valve opened
6/20/2012	3:56:35 PM	BCl3 valve opened
6/20/2012	3:56:35 PM	SiCl4 pre valve opened
6/20/2012	3:56:35 PM	SiCl4 post valve opened
6/20/2012	3:56:35 PM	Bubbler valve opened
6/20/2012	3:56:35 PM	Helium MFC set to  0.000000
6/20/2012	3:56:35 PM	H2 MFC set to  450.000000
6/20/2012	3:56:35 PM	BCl3 MFC set to  1.000000
6/20/2012	3:56:35 PM	PH3 MFC set to  0.000000
6/20/2012	3:56:35 PM	SiCl4 MFC set to  50.000000
6/20/2012	3:56:35 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	3:56:36 PM	Tube furnace set to 1000
6/20/2012	4:11:06 PM	Helium valve closed
6/20/2012	4:11:06 PM	BCl3 valve closed
6/20/2012	4:11:06 PM	Main Vac valve closed
6/20/2012	4:11:06 PM	Bypass valve closed
6/20/2012	4:11:06 PM	H2 valve opened
6/20/2012	4:11:06 PM	PH3 valve opened
6/20/2012	4:11:06 PM	SiCl4 pre valve opened
6/20/2012	4:11:06 PM	SiCl4 post valve opened
6/20/2012	4:11:06 PM	Bubbler valve opened
6/20/2012	4:11:06 PM	Helium MFC set to  0.000000
6/20/2012	4:11:06 PM	H2 MFC set to  445.000000
6/20/2012	4:11:06 PM	BCl3 MFC set to  0.000000
6/20/2012	4:11:06 PM	PH3 MFC set to  5.000000
6/20/2012	4:11:06 PM	SiCl4 MFC set to  50.000000
6/20/2012	4:11:06 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	4:11:06 PM	Tube furnace set to 1000
6/20/2012	4:25:36 PM	Helium valve closed
6/20/2012	4:25:36 PM	BCl3 valve closed
6/20/2012	4:25:36 PM	PH3 valve closed
6/20/2012	4:25:36 PM	SiCl4 pre valve closed
6/20/2012	4:25:36 PM	SiCl4 post valve closed
6/20/2012	4:25:36 PM	Main Vac valve closed
6/20/2012	4:25:36 PM	Bypass valve closed
6/20/2012	4:25:36 PM	H2 valve opened
6/20/2012	4:25:36 PM	Bubbler valve opened
6/20/2012	4:25:36 PM	Helium MFC set to  0.000000
6/20/2012	4:25:36 PM	H2 MFC set to  500.000000
6/20/2012	4:25:36 PM	BCl3 MFC set to  0.000000
6/20/2012	4:25:36 PM	PH3 MFC set to  0.000000
6/20/2012	4:25:36 PM	SiCl4 MFC set to  0.000000
6/20/2012	4:25:36 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	4:25:36 PM	Tube furnace set to 750
6/20/2012	4:40:36 PM	H2 valve closed
6/20/2012	4:40:36 PM	BCl3 valve closed
6/20/2012	4:40:36 PM	PH3 valve closed
6/20/2012	4:40:36 PM	SiCl4 pre valve closed
6/20/2012	4:40:36 PM	SiCl4 post valve closed
6/20/2012	4:40:36 PM	Main Vac valve closed
6/20/2012	4:40:36 PM	Bypass valve closed
6/20/2012	4:40:36 PM	Helium valve opened
6/20/2012	4:40:36 PM	Bubbler valve opened
6/20/2012	4:40:36 PM	Helium MFC set to  500.000000
6/20/2012	4:40:36 PM	H2 MFC set to  0.000000
6/20/2012	4:40:36 PM	BCl3 MFC set to  0.000000
6/20/2012	4:40:36 PM	PH3 MFC set to  0.000000
6/20/2012	4:40:36 PM	SiCl4 MFC set to  0.000000
6/20/2012	4:40:36 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	4:40:36 PM	Tube furnace set to 0
6/20/2012	4:59:19 PM	Helium valve closed
6/20/2012	4:59:19 PM	H2 valve closed
6/20/2012	4:59:19 PM	BCl3 valve closed
6/20/2012	4:59:19 PM	PH3 valve closed
6/20/2012	4:59:19 PM	SiCl4 pre valve closed
6/20/2012	4:59:19 PM	SiCl4 post valve closed
6/20/2012	4:59:19 PM	Main Vac valve closed
6/20/2012	4:59:19 PM	Bypass valve closed
6/20/2012	4:59:19 PM	Bubbler valve closed
6/20/2012	4:59:19 PM	Helium MFC set to  0.000000
6/20/2012	4:59:19 PM	H2 MFC set to  0.000000
6/20/2012	4:59:19 PM	BCl3 MFC set to  0.000000
6/20/2012	4:59:19 PM	PH3 MFC set to  0.000000
6/20/2012	4:59:19 PM	SiCl4 MFC set to  0.000000
6/20/2012	4:59:19 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	4:59:20 PM	Tube furnace set to 0
6/20/2012	4:59:38 PM	Helium valve closed
6/20/2012	4:59:38 PM	H2 valve closed
6/20/2012	4:59:38 PM	BCl3 valve closed
6/20/2012	4:59:38 PM	PH3 valve closed
6/20/2012	4:59:38 PM	SiCl4 pre valve closed
6/20/2012	4:59:38 PM	SiCl4 post valve closed
6/20/2012	4:59:38 PM	Main Vac valve closed
6/20/2012	4:59:38 PM	Bubbler valve closed
6/20/2012	4:59:38 PM	Bypass valve opened
6/20/2012	4:59:38 PM	Helium MFC set to  0.000000
6/20/2012	4:59:38 PM	H2 MFC set to  0.000000
6/20/2012	4:59:38 PM	BCl3 MFC set to  0.000000
6/20/2012	4:59:38 PM	PH3 MFC set to  0.000000
6/20/2012	4:59:38 PM	SiCl4 MFC set to  0.000000
6/20/2012	4:59:38 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	4:59:38 PM	Tube furnace set to 0
6/20/2012	5:00:32 PM	Helium valve closed
6/20/2012	5:00:32 PM	H2 valve closed
6/20/2012	5:00:32 PM	BCl3 valve closed
6/20/2012	5:00:32 PM	PH3 valve closed
6/20/2012	5:00:32 PM	SiCl4 pre valve closed
6/20/2012	5:00:32 PM	SiCl4 post valve closed
6/20/2012	5:00:32 PM	Main Vac valve closed
6/20/2012	5:00:32 PM	Bubbler valve closed
6/20/2012	5:00:32 PM	Bypass valve opened
6/20/2012	5:00:32 PM	Helium MFC set to  0.000000
6/20/2012	5:00:32 PM	H2 MFC set to  0.000000
6/20/2012	5:00:32 PM	BCl3 MFC set to  0.000000
6/20/2012	5:00:32 PM	PH3 MFC set to  0.000000
6/20/2012	5:00:32 PM	SiCl4 MFC set to  0.000000
6/20/2012	5:00:32 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	5:00:32 PM	Tube furnace set to 0
6/20/2012	5:01:33 PM	Helium valve closed
6/20/2012	5:01:33 PM	H2 valve closed
6/20/2012	5:01:33 PM	BCl3 valve closed
6/20/2012	5:01:33 PM	PH3 valve closed
6/20/2012	5:01:33 PM	SiCl4 pre valve closed
6/20/2012	5:01:33 PM	SiCl4 post valve closed
6/20/2012	5:01:33 PM	Bypass valve closed
6/20/2012	5:01:33 PM	Bubbler valve closed
6/20/2012	5:01:33 PM	Main Vac valve opened
6/20/2012	5:01:33 PM	Helium MFC set to  0.000000
6/20/2012	5:01:33 PM	H2 MFC set to  0.000000
6/20/2012	5:01:33 PM	BCl3 MFC set to  0.000000
6/20/2012	5:01:33 PM	PH3 MFC set to  0.000000
6/20/2012	5:01:33 PM	SiCl4 MFC set to  0.000000
6/20/2012	5:01:33 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	5:01:33 PM	Tube furnace set to 0
6/20/2012	5:05:06 PM	Run finished at 5:05 PM
6/20/2012	5:05:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2012	5:05:15 PM	Recipe started at 5:05 PM
6/20/2012	5:05:15 PM	Helium valve closed
6/20/2012	5:05:15 PM	H2 valve closed
6/20/2012	5:05:15 PM	BCl3 valve closed
6/20/2012	5:05:15 PM	PH3 valve closed
6/20/2012	5:05:15 PM	SiCl4 pre valve closed
6/20/2012	5:05:15 PM	SiCl4 post valve closed
6/20/2012	5:05:15 PM	Main Vac valve closed
6/20/2012	5:05:15 PM	Bypass valve closed
6/20/2012	5:05:15 PM	Bubbler valve closed
6/20/2012	5:05:15 PM	Helium MFC set to  0.000000
6/20/2012	5:05:15 PM	H2 MFC set to  0.000000
6/20/2012	5:05:15 PM	BCl3 MFC set to  0.000000
6/20/2012	5:05:15 PM	PH3 MFC set to  0.000000
6/20/2012	5:05:15 PM	SiCl4 MFC set to  0.000000
6/20/2012	5:05:15 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	5:05:15 PM	Tube furnace set to 0
6/20/2012	5:05:18 PM	H2 valve closed
6/20/2012	5:05:18 PM	BCl3 valve closed
6/20/2012	5:05:18 PM	PH3 valve closed
6/20/2012	5:05:18 PM	SiCl4 pre valve closed
6/20/2012	5:05:18 PM	SiCl4 post valve closed
6/20/2012	5:05:18 PM	Main Vac valve closed
6/20/2012	5:05:18 PM	Bypass valve closed
6/20/2012	5:05:18 PM	Bubbler valve closed
6/20/2012	5:05:18 PM	Helium valve opened
6/20/2012	5:05:18 PM	Helium MFC set to  500.000000
6/20/2012	5:05:18 PM	H2 MFC set to  0.000000
6/20/2012	5:05:18 PM	BCl3 MFC set to  0.000000
6/20/2012	5:05:18 PM	PH3 MFC set to  0.000000
6/20/2012	5:05:18 PM	SiCl4 MFC set to  0.000000
6/20/2012	5:05:18 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	5:05:18 PM	Tube furnace set to 0
6/20/2012	5:06:28 PM	Helium valve closed
6/20/2012	5:06:28 PM	H2 valve closed
6/20/2012	5:06:28 PM	BCl3 valve closed
6/20/2012	5:06:28 PM	PH3 valve closed
6/20/2012	5:06:28 PM	SiCl4 pre valve closed
6/20/2012	5:06:28 PM	SiCl4 post valve closed
6/20/2012	5:06:28 PM	Main Vac valve closed
6/20/2012	5:06:28 PM	Bypass valve closed
6/20/2012	5:06:28 PM	Bubbler valve closed
6/20/2012	5:06:28 PM	Helium MFC set to  0.000000
6/20/2012	5:06:28 PM	H2 MFC set to  0.000000
6/20/2012	5:06:28 PM	BCl3 MFC set to  0.000000
6/20/2012	5:06:28 PM	PH3 MFC set to  0.000000
6/20/2012	5:06:28 PM	SiCl4 MFC set to  0.000000
6/20/2012	5:06:28 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	5:06:28 PM	Tube furnace set to 0
6/20/2012	5:06:29 PM	Run finished at 5:06 PM
6/20/2012	5:06:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2012	5:19:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/20/2012	5:19:51 PM	Recipe started at 5:19 PM
6/20/2012	5:19:51 PM	Helium valve closed
6/20/2012	5:19:51 PM	H2 valve closed
6/20/2012	5:19:51 PM	BCl3 valve closed
6/20/2012	5:19:51 PM	PH3 valve closed
6/20/2012	5:19:51 PM	SiCl4 pre valve closed
6/20/2012	5:19:51 PM	SiCl4 post valve closed
6/20/2012	5:19:51 PM	Main Vac valve closed
6/20/2012	5:19:51 PM	Bubbler valve closed
6/20/2012	5:19:51 PM	Bypass valve opened
6/20/2012	5:19:51 PM	Helium MFC set to  0.000000
6/20/2012	5:19:51 PM	H2 MFC set to  0.000000
6/20/2012	5:19:51 PM	BCl3 MFC set to  0.000000
6/20/2012	5:19:51 PM	PH3 MFC set to  0.000000
6/20/2012	5:19:51 PM	SiCl4 MFC set to  0.000000
6/20/2012	5:19:51 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	5:19:51 PM	Tube furnace set to 0
6/20/2012	5:21:06 PM	Helium valve closed
6/20/2012	5:21:06 PM	H2 valve closed
6/20/2012	5:21:06 PM	BCl3 valve closed
6/20/2012	5:21:06 PM	PH3 valve closed
6/20/2012	5:21:06 PM	SiCl4 pre valve closed
6/20/2012	5:21:06 PM	SiCl4 post valve closed
6/20/2012	5:21:06 PM	Main Vac valve closed
6/20/2012	5:21:06 PM	Bubbler valve closed
6/20/2012	5:21:06 PM	Bypass valve opened
6/20/2012	5:21:06 PM	Helium MFC set to  0.000000
6/20/2012	5:21:06 PM	H2 MFC set to  0.000000
6/20/2012	5:21:06 PM	BCl3 MFC set to  0.000000
6/20/2012	5:21:07 PM	PH3 MFC set to  0.000000
6/20/2012	5:21:07 PM	SiCl4 MFC set to  0.000000
6/20/2012	5:21:07 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	5:21:07 PM	Tube furnace set to 0
6/20/2012	5:22:07 PM	Helium valve closed
6/20/2012	5:22:07 PM	H2 valve closed
6/20/2012	5:22:07 PM	BCl3 valve closed
6/20/2012	5:22:07 PM	PH3 valve closed
6/20/2012	5:22:07 PM	SiCl4 pre valve closed
6/20/2012	5:22:07 PM	SiCl4 post valve closed
6/20/2012	5:22:07 PM	Bypass valve closed
6/20/2012	5:22:07 PM	Bubbler valve closed
6/20/2012	5:22:07 PM	Main Vac valve opened
6/20/2012	5:22:07 PM	Helium MFC set to  0.000000
6/20/2012	5:22:07 PM	H2 MFC set to  0.000000
6/20/2012	5:22:07 PM	BCl3 MFC set to  0.000000
6/20/2012	5:22:07 PM	PH3 MFC set to  0.000000
6/20/2012	5:22:07 PM	SiCl4 MFC set to  0.000000
6/20/2012	5:22:07 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	5:22:07 PM	Tube furnace set to 0
6/20/2012	5:22:08 PM	Run finished at 5:22 PM
6/20/2012	5:22:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/20/2012	5:55:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2012	5:55:09 PM	Recipe started at 5:55 PM
6/20/2012	5:55:09 PM	Helium valve closed
6/20/2012	5:55:09 PM	H2 valve closed
6/20/2012	5:55:09 PM	BCl3 valve closed
6/20/2012	5:55:09 PM	PH3 valve closed
6/20/2012	5:55:09 PM	SiCl4 pre valve closed
6/20/2012	5:55:09 PM	SiCl4 post valve closed
6/20/2012	5:55:09 PM	Main Vac valve closed
6/20/2012	5:55:09 PM	Bypass valve closed
6/20/2012	5:55:09 PM	Bubbler valve closed
6/20/2012	5:55:09 PM	Helium MFC set to  0.000000
6/20/2012	5:55:09 PM	H2 MFC set to  0.000000
6/20/2012	5:55:09 PM	BCl3 MFC set to  0.000000
6/20/2012	5:55:09 PM	PH3 MFC set to  0.000000
6/20/2012	5:55:09 PM	SiCl4 MFC set to  0.000000
6/20/2012	5:55:09 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	5:55:09 PM	Tube furnace set to 0
6/20/2012	5:55:12 PM	H2 valve closed
6/20/2012	5:55:12 PM	BCl3 valve closed
6/20/2012	5:55:12 PM	PH3 valve closed
6/20/2012	5:55:12 PM	SiCl4 pre valve closed
6/20/2012	5:55:12 PM	SiCl4 post valve closed
6/20/2012	5:55:12 PM	Main Vac valve closed
6/20/2012	5:55:12 PM	Bypass valve closed
6/20/2012	5:55:12 PM	Bubbler valve closed
6/20/2012	5:55:12 PM	Helium valve opened
6/20/2012	5:55:13 PM	Helium MFC set to  500.000000
6/20/2012	5:55:13 PM	H2 MFC set to  0.000000
6/20/2012	5:55:13 PM	BCl3 MFC set to  0.000000
6/20/2012	5:55:13 PM	PH3 MFC set to  0.000000
6/20/2012	5:55:13 PM	SiCl4 MFC set to  0.000000
6/20/2012	5:55:13 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	5:55:13 PM	Tube furnace set to 0
6/20/2012	5:56:22 PM	Helium valve closed
6/20/2012	5:56:22 PM	H2 valve closed
6/20/2012	5:56:22 PM	BCl3 valve closed
6/20/2012	5:56:22 PM	PH3 valve closed
6/20/2012	5:56:22 PM	SiCl4 pre valve closed
6/20/2012	5:56:22 PM	SiCl4 post valve closed
6/20/2012	5:56:22 PM	Main Vac valve closed
6/20/2012	5:56:22 PM	Bypass valve closed
6/20/2012	5:56:22 PM	Bubbler valve closed
6/20/2012	5:56:22 PM	Helium MFC set to  0.000000
6/20/2012	5:56:22 PM	H2 MFC set to  0.000000
6/20/2012	5:56:22 PM	BCl3 MFC set to  0.000000
6/20/2012	5:56:22 PM	PH3 MFC set to  0.000000
6/20/2012	5:56:22 PM	SiCl4 MFC set to  0.000000
6/20/2012	5:56:22 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	5:56:22 PM	Tube furnace set to 0
6/20/2012	5:56:23 PM	Run finished at 5:56 PM
6/20/2012	5:56:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2012	6:06:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/20/2012	6:06:43 PM	Recipe started at 6:06 PM
6/20/2012	6:06:43 PM	Helium valve closed
6/20/2012	6:06:43 PM	H2 valve closed
6/20/2012	6:06:43 PM	BCl3 valve closed
6/20/2012	6:06:43 PM	PH3 valve closed
6/20/2012	6:06:43 PM	SiCl4 pre valve closed
6/20/2012	6:06:43 PM	SiCl4 post valve closed
6/20/2012	6:06:43 PM	Main Vac valve closed
6/20/2012	6:06:43 PM	Bubbler valve closed
6/20/2012	6:06:43 PM	Bypass valve opened
6/20/2012	6:06:43 PM	Helium MFC set to  0.000000
6/20/2012	6:06:43 PM	H2 MFC set to  0.000000
6/20/2012	6:06:43 PM	BCl3 MFC set to  0.000000
6/20/2012	6:06:43 PM	PH3 MFC set to  0.000000
6/20/2012	6:06:43 PM	SiCl4 MFC set to  0.000000
6/20/2012	6:06:43 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	6:06:43 PM	Tube furnace set to 0
6/20/2012	6:07:56 PM	Helium valve closed
6/20/2012	6:07:56 PM	H2 valve closed
6/20/2012	6:07:56 PM	BCl3 valve closed
6/20/2012	6:07:56 PM	PH3 valve closed
6/20/2012	6:07:56 PM	SiCl4 pre valve closed
6/20/2012	6:07:56 PM	SiCl4 post valve closed
6/20/2012	6:07:56 PM	Main Vac valve closed
6/20/2012	6:07:56 PM	Bubbler valve closed
6/20/2012	6:07:56 PM	Bypass valve opened
6/20/2012	6:07:56 PM	Helium MFC set to  0.000000
6/20/2012	6:07:56 PM	H2 MFC set to  0.000000
6/20/2012	6:07:56 PM	BCl3 MFC set to  0.000000
6/20/2012	6:07:56 PM	PH3 MFC set to  0.000000
6/20/2012	6:07:56 PM	SiCl4 MFC set to  0.000000
6/20/2012	6:07:56 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	6:07:56 PM	Tube furnace set to 0
6/20/2012	6:08:56 PM	Helium valve closed
6/20/2012	6:08:56 PM	H2 valve closed
6/20/2012	6:08:56 PM	BCl3 valve closed
6/20/2012	6:08:56 PM	PH3 valve closed
6/20/2012	6:08:56 PM	SiCl4 pre valve closed
6/20/2012	6:08:56 PM	SiCl4 post valve closed
6/20/2012	6:08:56 PM	Bypass valve closed
6/20/2012	6:08:57 PM	Bubbler valve closed
6/20/2012	6:08:57 PM	Main Vac valve opened
6/20/2012	6:08:57 PM	Helium MFC set to  0.000000
6/20/2012	6:08:57 PM	H2 MFC set to  0.000000
6/20/2012	6:08:57 PM	BCl3 MFC set to  0.000000
6/20/2012	6:08:57 PM	PH3 MFC set to  0.000000
6/20/2012	6:08:57 PM	SiCl4 MFC set to  0.000000
6/20/2012	6:08:57 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	6:08:57 PM	Tube furnace set to 0
6/20/2012	6:08:58 PM	Run finished at 6:08 PM
6/20/2012	6:08:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/20/2012	6:12:25 PM	Recipe started at 6:12 PM
6/20/2012	6:12:25 PM	Helium valve closed
6/20/2012	6:12:25 PM	H2 valve closed
6/20/2012	6:12:25 PM	BCl3 valve closed
6/20/2012	6:12:25 PM	PH3 valve closed
6/20/2012	6:12:25 PM	SiCl4 pre valve closed
6/20/2012	6:12:25 PM	SiCl4 post valve closed
6/20/2012	6:12:25 PM	Bypass valve closed
6/20/2012	6:12:25 PM	Bubbler valve closed
6/20/2012	6:12:25 PM	Main Vac valve opened
6/20/2012	6:12:25 PM	Helium MFC set to  0.000000
6/20/2012	6:12:25 PM	H2 MFC set to  0.000000
6/20/2012	6:12:25 PM	BCl3 MFC set to  0.000000
6/20/2012	6:12:25 PM	PH3 MFC set to  0.000000
6/20/2012	6:12:25 PM	SiCl4 MFC set to  0.000000
6/20/2012	6:12:25 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	6:12:26 PM	Tube furnace set to 0
6/20/2012	7:42:26 PM	Helium valve closed
6/20/2012	7:42:26 PM	H2 valve closed
6/20/2012	7:42:26 PM	BCl3 valve closed
6/20/2012	7:42:26 PM	PH3 valve closed
6/20/2012	7:42:26 PM	SiCl4 pre valve closed
6/20/2012	7:42:26 PM	SiCl4 post valve closed
6/20/2012	7:42:26 PM	Main Vac valve closed
6/20/2012	7:42:26 PM	Bypass valve closed
6/20/2012	7:42:26 PM	Bubbler valve closed
6/20/2012	7:42:26 PM	Helium MFC set to  0.000000
6/20/2012	7:42:26 PM	H2 MFC set to  0.000000
6/20/2012	7:42:26 PM	BCl3 MFC set to  0.000000
6/20/2012	7:42:26 PM	PH3 MFC set to  0.000000
6/20/2012	7:42:26 PM	SiCl4 MFC set to  0.000000
6/20/2012	7:42:26 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	7:42:26 PM	Tube furnace set to 0
6/20/2012	7:42:29 PM	Helium valve closed
6/20/2012	7:42:29 PM	BCl3 valve closed
6/20/2012	7:42:29 PM	PH3 valve closed
6/20/2012	7:42:29 PM	SiCl4 pre valve closed
6/20/2012	7:42:29 PM	SiCl4 post valve closed
6/20/2012	7:42:29 PM	Main Vac valve closed
6/20/2012	7:42:29 PM	Bypass valve closed
6/20/2012	7:42:29 PM	Bubbler valve closed
6/20/2012	7:42:29 PM	H2 valve opened
6/20/2012	7:42:29 PM	Helium MFC set to  0.000000
6/20/2012	7:42:29 PM	H2 MFC set to  500.000000
6/20/2012	7:42:29 PM	BCl3 MFC set to  0.000000
6/20/2012	7:42:29 PM	PH3 MFC set to  0.000000
6/20/2012	7:42:29 PM	SiCl4 MFC set to  0.000000
6/20/2012	7:42:29 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	7:42:29 PM	Tube furnace set to 0
6/20/2012	7:43:44 PM	Helium valve closed
6/20/2012	7:43:44 PM	BCl3 valve closed
6/20/2012	7:43:44 PM	PH3 valve closed
6/20/2012	7:43:44 PM	SiCl4 pre valve closed
6/20/2012	7:43:44 PM	SiCl4 post valve closed
6/20/2012	7:43:44 PM	Main Vac valve closed
6/20/2012	7:43:44 PM	Bypass valve closed
6/20/2012	7:43:44 PM	H2 valve opened
6/20/2012	7:43:44 PM	Bubbler valve opened
6/20/2012	7:43:44 PM	Helium MFC set to  0.000000
6/20/2012	7:43:44 PM	H2 MFC set to  500.000000
6/20/2012	7:43:44 PM	BCl3 MFC set to  0.000000
6/20/2012	7:43:44 PM	PH3 MFC set to  0.000000
6/20/2012	7:43:44 PM	SiCl4 MFC set to  0.000000
6/20/2012	7:43:44 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	7:43:44 PM	Tube furnace set to 0
6/20/2012	7:43:45 PM	Helium valve closed
6/20/2012	7:43:45 PM	BCl3 valve closed
6/20/2012	7:43:45 PM	PH3 valve closed
6/20/2012	7:43:45 PM	SiCl4 pre valve closed
6/20/2012	7:43:45 PM	SiCl4 post valve closed
6/20/2012	7:43:45 PM	Main Vac valve closed
6/20/2012	7:43:45 PM	Bypass valve closed
6/20/2012	7:43:45 PM	H2 valve opened
6/20/2012	7:43:45 PM	Bubbler valve opened
6/20/2012	7:43:45 PM	Helium MFC set to  0.000000
6/20/2012	7:43:45 PM	H2 MFC set to  500.000000
6/20/2012	7:43:45 PM	BCl3 MFC set to  0.000000
6/20/2012	7:43:45 PM	PH3 MFC set to  0.000000
6/20/2012	7:43:45 PM	SiCl4 MFC set to  0.000000
6/20/2012	7:43:45 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	7:43:46 PM	Tube furnace set to 1000
6/20/2012	8:08:46 PM	Helium valve closed
6/20/2012	8:08:46 PM	PH3 valve closed
6/20/2012	8:08:46 PM	Main Vac valve closed
6/20/2012	8:08:46 PM	Bypass valve closed
6/20/2012	8:08:46 PM	H2 valve opened
6/20/2012	8:08:46 PM	BCl3 valve opened
6/20/2012	8:08:46 PM	SiCl4 pre valve opened
6/20/2012	8:08:46 PM	SiCl4 post valve opened
6/20/2012	8:08:46 PM	Bubbler valve opened
6/20/2012	8:08:46 PM	Helium MFC set to  0.000000
6/20/2012	8:08:46 PM	H2 MFC set to  450.000000
6/20/2012	8:08:46 PM	BCl3 MFC set to  1.000000
6/20/2012	8:08:46 PM	PH3 MFC set to  0.000000
6/20/2012	8:08:46 PM	SiCl4 MFC set to  50.000000
6/20/2012	8:08:46 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	8:08:46 PM	Tube furnace set to 1000
6/20/2012	8:23:16 PM	Helium valve closed
6/20/2012	8:23:16 PM	BCl3 valve closed
6/20/2012	8:23:16 PM	Main Vac valve closed
6/20/2012	8:23:16 PM	Bypass valve closed
6/20/2012	8:23:16 PM	H2 valve opened
6/20/2012	8:23:16 PM	PH3 valve opened
6/20/2012	8:23:16 PM	SiCl4 pre valve opened
6/20/2012	8:23:16 PM	SiCl4 post valve opened
6/20/2012	8:23:16 PM	Bubbler valve opened
6/20/2012	8:23:16 PM	Helium MFC set to  0.000000
6/20/2012	8:23:16 PM	H2 MFC set to  445.000000
6/20/2012	8:23:16 PM	BCl3 MFC set to  0.000000
6/20/2012	8:23:16 PM	PH3 MFC set to  5.000000
6/20/2012	8:23:16 PM	SiCl4 MFC set to  50.000000
6/20/2012	8:23:16 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	8:23:16 PM	Tube furnace set to 1000
6/20/2012	8:37:46 PM	Helium valve closed
6/20/2012	8:37:46 PM	BCl3 valve closed
6/20/2012	8:37:46 PM	PH3 valve closed
6/20/2012	8:37:46 PM	SiCl4 pre valve closed
6/20/2012	8:37:46 PM	SiCl4 post valve closed
6/20/2012	8:37:46 PM	Main Vac valve closed
6/20/2012	8:37:46 PM	Bypass valve closed
6/20/2012	8:37:46 PM	H2 valve opened
6/20/2012	8:37:46 PM	Bubbler valve opened
6/20/2012	8:37:46 PM	Helium MFC set to  0.000000
6/20/2012	8:37:46 PM	H2 MFC set to  500.000000
6/20/2012	8:37:46 PM	BCl3 MFC set to  0.000000
6/20/2012	8:37:46 PM	PH3 MFC set to  0.000000
6/20/2012	8:37:46 PM	SiCl4 MFC set to  0.000000
6/20/2012	8:37:46 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	8:37:46 PM	Tube furnace set to 750
6/20/2012	8:52:46 PM	H2 valve closed
6/20/2012	8:52:46 PM	BCl3 valve closed
6/20/2012	8:52:46 PM	PH3 valve closed
6/20/2012	8:52:46 PM	SiCl4 pre valve closed
6/20/2012	8:52:46 PM	SiCl4 post valve closed
6/20/2012	8:52:46 PM	Main Vac valve closed
6/20/2012	8:52:46 PM	Bypass valve closed
6/20/2012	8:52:46 PM	Helium valve opened
6/20/2012	8:52:46 PM	Bubbler valve opened
6/20/2012	8:52:46 PM	Helium MFC set to  500.000000
6/20/2012	8:52:46 PM	H2 MFC set to  0.000000
6/20/2012	8:52:46 PM	BCl3 MFC set to  0.000000
6/20/2012	8:52:46 PM	PH3 MFC set to  0.000000
6/20/2012	8:52:46 PM	SiCl4 MFC set to  0.000000
6/20/2012	8:52:46 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	8:52:46 PM	Tube furnace set to 0
6/20/2012	9:12:46 PM	Helium valve closed
6/20/2012	9:12:46 PM	H2 valve closed
6/20/2012	9:12:46 PM	BCl3 valve closed
6/20/2012	9:12:46 PM	PH3 valve closed
6/20/2012	9:12:46 PM	SiCl4 pre valve closed
6/20/2012	9:12:46 PM	SiCl4 post valve closed
6/20/2012	9:12:46 PM	Main Vac valve closed
6/20/2012	9:12:46 PM	Bypass valve closed
6/20/2012	9:12:46 PM	Bubbler valve closed
6/20/2012	9:12:46 PM	Helium MFC set to  0.000000
6/20/2012	9:12:46 PM	H2 MFC set to  0.000000
6/20/2012	9:12:46 PM	BCl3 MFC set to  0.000000
6/20/2012	9:12:46 PM	PH3 MFC set to  0.000000
6/20/2012	9:12:46 PM	SiCl4 MFC set to  0.000000
6/20/2012	9:12:46 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	9:12:47 PM	Tube furnace set to 0
6/20/2012	9:32:46 PM	Helium valve closed
6/20/2012	9:32:46 PM	H2 valve closed
6/20/2012	9:32:46 PM	BCl3 valve closed
6/20/2012	9:32:46 PM	PH3 valve closed
6/20/2012	9:32:47 PM	SiCl4 pre valve closed
6/20/2012	9:32:47 PM	SiCl4 post valve closed
6/20/2012	9:32:47 PM	Main Vac valve closed
6/20/2012	9:32:47 PM	Bubbler valve closed
6/20/2012	9:32:47 PM	Bypass valve opened
6/20/2012	9:32:47 PM	Helium MFC set to  0.000000
6/20/2012	9:32:47 PM	H2 MFC set to  0.000000
6/20/2012	9:32:47 PM	BCl3 MFC set to  0.000000
6/20/2012	9:32:47 PM	PH3 MFC set to  0.000000
6/20/2012	9:32:47 PM	SiCl4 MFC set to  0.000000
6/20/2012	9:32:47 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	9:32:47 PM	Tube furnace set to 0
6/20/2012	9:33:37 PM	Helium valve closed
6/20/2012	9:33:37 PM	H2 valve closed
6/20/2012	9:33:37 PM	BCl3 valve closed
6/20/2012	9:33:37 PM	PH3 valve closed
6/20/2012	9:33:37 PM	SiCl4 pre valve closed
6/20/2012	9:33:37 PM	SiCl4 post valve closed
6/20/2012	9:33:37 PM	Main Vac valve closed
6/20/2012	9:33:37 PM	Bubbler valve closed
6/20/2012	9:33:37 PM	Bypass valve opened
6/20/2012	9:33:38 PM	Helium MFC set to  0.000000
6/20/2012	9:33:38 PM	H2 MFC set to  0.000000
6/20/2012	9:33:38 PM	BCl3 MFC set to  0.000000
6/20/2012	9:33:38 PM	PH3 MFC set to  0.000000
6/20/2012	9:33:38 PM	SiCl4 MFC set to  0.000000
6/20/2012	9:33:38 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	9:33:38 PM	Tube furnace set to 0
6/20/2012	9:34:38 PM	Helium valve closed
6/20/2012	9:34:38 PM	H2 valve closed
6/20/2012	9:34:38 PM	BCl3 valve closed
6/20/2012	9:34:38 PM	PH3 valve closed
6/20/2012	9:34:38 PM	SiCl4 pre valve closed
6/20/2012	9:34:38 PM	SiCl4 post valve closed
6/20/2012	9:34:38 PM	Bypass valve closed
6/20/2012	9:34:38 PM	Bubbler valve closed
6/20/2012	9:34:38 PM	Main Vac valve opened
6/20/2012	9:34:38 PM	Helium MFC set to  0.000000
6/20/2012	9:34:38 PM	H2 MFC set to  0.000000
6/20/2012	9:34:38 PM	BCl3 MFC set to  0.000000
6/20/2012	9:34:38 PM	PH3 MFC set to  0.000000
6/20/2012	9:34:38 PM	SiCl4 MFC set to  0.000000
6/20/2012	9:34:38 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	9:34:38 PM	Tube furnace set to 0
6/20/2012	10:00:27 PM	Run aborted at 10:00 PM
6/20/2012	10:00:27 PM	Helium valve closed
6/20/2012	10:00:27 PM	H2 valve closed
6/20/2012	10:00:27 PM	BCl3 valve closed
6/20/2012	10:00:27 PM	PH3 valve closed
6/20/2012	10:00:27 PM	SiCl4 pre valve closed
6/20/2012	10:00:27 PM	SiCl4 post valve closed
6/20/2012	10:00:27 PM	Bypass valve closed
6/20/2012	10:00:27 PM	Main Vac valve closed
6/20/2012	10:00:27 PM	Bubbler valve closed
6/20/2012	10:00:27 PM	Helium MFC set to  0.000000
6/20/2012	10:00:27 PM	H2 MFC set to  0.000000
6/20/2012	10:00:27 PM	BCl3 MFC set to  0.000000
6/20/2012	10:00:27 PM	PH3 MFC set to  0.000000
6/20/2012	10:00:27 PM	SiCl4 MFC set to  0.000000
6/20/2012	10:00:27 PM	Tube furnace set to 0
6/20/2012	10:00:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2012	10:00:32 PM	Recipe started at 10:00 PM
6/20/2012	10:00:32 PM	Helium valve closed
6/20/2012	10:00:32 PM	H2 valve closed
6/20/2012	10:00:32 PM	BCl3 valve closed
6/20/2012	10:00:32 PM	PH3 valve closed
6/20/2012	10:00:32 PM	SiCl4 pre valve closed
6/20/2012	10:00:32 PM	SiCl4 post valve closed
6/20/2012	10:00:32 PM	Main Vac valve closed
6/20/2012	10:00:32 PM	Bypass valve closed
6/20/2012	10:00:32 PM	Bubbler valve closed
6/20/2012	10:00:32 PM	Helium MFC set to  0.000000
6/20/2012	10:00:32 PM	H2 MFC set to  0.000000
6/20/2012	10:00:32 PM	BCl3 MFC set to  0.000000
6/20/2012	10:00:32 PM	PH3 MFC set to  0.000000
6/20/2012	10:00:32 PM	SiCl4 MFC set to  0.000000
6/20/2012	10:00:32 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	10:00:32 PM	Tube furnace set to 0
6/20/2012	10:00:35 PM	H2 valve closed
6/20/2012	10:00:35 PM	BCl3 valve closed
6/20/2012	10:00:35 PM	PH3 valve closed
6/20/2012	10:00:35 PM	SiCl4 pre valve closed
6/20/2012	10:00:35 PM	SiCl4 post valve closed
6/20/2012	10:00:35 PM	Main Vac valve closed
6/20/2012	10:00:35 PM	Bypass valve closed
6/20/2012	10:00:35 PM	Bubbler valve closed
6/20/2012	10:00:35 PM	Helium valve opened
6/20/2012	10:00:35 PM	Helium MFC set to  500.000000
6/20/2012	10:00:35 PM	H2 MFC set to  0.000000
6/20/2012	10:00:35 PM	BCl3 MFC set to  0.000000
6/20/2012	10:00:35 PM	PH3 MFC set to  0.000000
6/20/2012	10:00:35 PM	SiCl4 MFC set to  0.000000
6/20/2012	10:00:35 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	10:00:35 PM	Tube furnace set to 0
6/20/2012	10:01:42 PM	Helium valve closed
6/20/2012	10:01:42 PM	H2 valve closed
6/20/2012	10:01:42 PM	BCl3 valve closed
6/20/2012	10:01:42 PM	PH3 valve closed
6/20/2012	10:01:42 PM	SiCl4 pre valve closed
6/20/2012	10:01:42 PM	SiCl4 post valve closed
6/20/2012	10:01:42 PM	Main Vac valve closed
6/20/2012	10:01:42 PM	Bypass valve closed
6/20/2012	10:01:42 PM	Bubbler valve closed
6/20/2012	10:01:42 PM	Helium MFC set to  0.000000
6/20/2012	10:01:42 PM	H2 MFC set to  0.000000
6/20/2012	10:01:42 PM	BCl3 MFC set to  0.000000
6/20/2012	10:01:42 PM	PH3 MFC set to  0.000000
6/20/2012	10:01:42 PM	SiCl4 MFC set to  0.000000
6/20/2012	10:01:42 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	10:01:42 PM	Tube furnace set to 0
6/20/2012	10:01:43 PM	Run finished at 10:01 PM
6/20/2012	10:01:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2012	10:05:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2012	10:05:54 PM	Recipe started at 10:05 PM
6/20/2012	10:05:54 PM	Helium valve closed
6/20/2012	10:05:54 PM	H2 valve closed
6/20/2012	10:05:54 PM	BCl3 valve closed
6/20/2012	10:05:54 PM	PH3 valve closed
6/20/2012	10:05:54 PM	SiCl4 pre valve closed
6/20/2012	10:05:54 PM	SiCl4 post valve closed
6/20/2012	10:05:54 PM	Main Vac valve closed
6/20/2012	10:05:54 PM	Bypass valve closed
6/20/2012	10:05:54 PM	Bubbler valve closed
6/20/2012	10:05:54 PM	Helium MFC set to  0.000000
6/20/2012	10:05:54 PM	H2 MFC set to  0.000000
6/20/2012	10:05:54 PM	BCl3 MFC set to  0.000000
6/20/2012	10:05:54 PM	PH3 MFC set to  0.000000
6/20/2012	10:05:54 PM	SiCl4 MFC set to  0.000000
6/20/2012	10:05:54 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	10:05:54 PM	Tube furnace set to 0
6/20/2012	10:05:57 PM	H2 valve closed
6/20/2012	10:05:57 PM	BCl3 valve closed
6/20/2012	10:05:57 PM	PH3 valve closed
6/20/2012	10:05:57 PM	SiCl4 pre valve closed
6/20/2012	10:05:57 PM	SiCl4 post valve closed
6/20/2012	10:05:57 PM	Main Vac valve closed
6/20/2012	10:05:57 PM	Bypass valve closed
6/20/2012	10:05:57 PM	Bubbler valve closed
6/20/2012	10:05:57 PM	Helium valve opened
6/20/2012	10:05:57 PM	Helium MFC set to  500.000000
6/20/2012	10:05:57 PM	H2 MFC set to  0.000000
6/20/2012	10:05:57 PM	BCl3 MFC set to  0.000000
6/20/2012	10:05:57 PM	PH3 MFC set to  0.000000
6/20/2012	10:05:57 PM	SiCl4 MFC set to  0.000000
6/20/2012	10:05:57 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	10:05:57 PM	Tube furnace set to 0
6/20/2012	10:05:59 PM	Helium valve closed
6/20/2012	10:05:59 PM	H2 valve closed
6/20/2012	10:05:59 PM	BCl3 valve closed
6/20/2012	10:05:59 PM	PH3 valve closed
6/20/2012	10:05:59 PM	SiCl4 pre valve closed
6/20/2012	10:05:59 PM	SiCl4 post valve closed
6/20/2012	10:05:59 PM	Main Vac valve closed
6/20/2012	10:05:59 PM	Bypass valve closed
6/20/2012	10:05:59 PM	Bubbler valve closed
6/20/2012	10:05:59 PM	Helium MFC set to  0.000000
6/20/2012	10:05:59 PM	H2 MFC set to  0.000000
6/20/2012	10:05:59 PM	BCl3 MFC set to  0.000000
6/20/2012	10:05:59 PM	PH3 MFC set to  0.000000
6/20/2012	10:05:59 PM	SiCl4 MFC set to  0.000000
6/20/2012	10:05:59 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	10:05:59 PM	Tube furnace set to 0
6/20/2012	10:06:00 PM	Run finished at 10:06 PM
6/20/2012	10:06:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/20/2012	10:10:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/20/2012	10:10:37 PM	Recipe started at 10:10 PM
6/20/2012	10:10:37 PM	Helium valve closed
6/20/2012	10:10:37 PM	H2 valve closed
6/20/2012	10:10:37 PM	BCl3 valve closed
6/20/2012	10:10:37 PM	PH3 valve closed
6/20/2012	10:10:37 PM	SiCl4 pre valve closed
6/20/2012	10:10:37 PM	SiCl4 post valve closed
6/20/2012	10:10:37 PM	Main Vac valve closed
6/20/2012	10:10:37 PM	Bubbler valve closed
6/20/2012	10:10:37 PM	Bypass valve opened
6/20/2012	10:10:37 PM	Helium MFC set to  0.000000
6/20/2012	10:10:37 PM	H2 MFC set to  0.000000
6/20/2012	10:10:37 PM	BCl3 MFC set to  0.000000
6/20/2012	10:10:37 PM	PH3 MFC set to  0.000000
6/20/2012	10:10:37 PM	SiCl4 MFC set to  0.000000
6/20/2012	10:10:37 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	10:10:37 PM	Tube furnace set to 0
6/20/2012	10:11:43 PM	Helium valve closed
6/20/2012	10:11:43 PM	H2 valve closed
6/20/2012	10:11:43 PM	BCl3 valve closed
6/20/2012	10:11:43 PM	PH3 valve closed
6/20/2012	10:11:43 PM	SiCl4 pre valve closed
6/20/2012	10:11:43 PM	SiCl4 post valve closed
6/20/2012	10:11:43 PM	Main Vac valve closed
6/20/2012	10:11:43 PM	Bubbler valve closed
6/20/2012	10:11:43 PM	Bypass valve opened
6/20/2012	10:11:43 PM	Helium MFC set to  0.000000
6/20/2012	10:11:43 PM	H2 MFC set to  0.000000
6/20/2012	10:11:43 PM	BCl3 MFC set to  0.000000
6/20/2012	10:11:43 PM	PH3 MFC set to  0.000000
6/20/2012	10:11:43 PM	SiCl4 MFC set to  0.000000
6/20/2012	10:11:43 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	10:11:43 PM	Tube furnace set to 0
6/20/2012	10:12:43 PM	Helium valve closed
6/20/2012	10:12:43 PM	H2 valve closed
6/20/2012	10:12:43 PM	BCl3 valve closed
6/20/2012	10:12:43 PM	PH3 valve closed
6/20/2012	10:12:43 PM	SiCl4 pre valve closed
6/20/2012	10:12:43 PM	SiCl4 post valve closed
6/20/2012	10:12:43 PM	Bypass valve closed
6/20/2012	10:12:43 PM	Bubbler valve closed
6/20/2012	10:12:43 PM	Main Vac valve opened
6/20/2012	10:12:43 PM	Helium MFC set to  0.000000
6/20/2012	10:12:43 PM	H2 MFC set to  0.000000
6/20/2012	10:12:43 PM	BCl3 MFC set to  0.000000
6/20/2012	10:12:43 PM	PH3 MFC set to  0.000000
6/20/2012	10:12:43 PM	SiCl4 MFC set to  0.000000
6/20/2012	10:12:43 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	10:12:44 PM	Tube furnace set to 0
6/20/2012	10:12:45 PM	Run finished at 10:12 PM
6/20/2012	10:12:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/20/2012	10:32:21 PM	Recipe started at 10:32 PM
6/20/2012	10:32:21 PM	Helium valve closed
6/20/2012	10:32:21 PM	H2 valve closed
6/20/2012	10:32:21 PM	BCl3 valve closed
6/20/2012	10:32:21 PM	PH3 valve closed
6/20/2012	10:32:21 PM	SiCl4 pre valve closed
6/20/2012	10:32:21 PM	SiCl4 post valve closed
6/20/2012	10:32:21 PM	Bypass valve closed
6/20/2012	10:32:21 PM	Bubbler valve closed
6/20/2012	10:32:21 PM	Main Vac valve opened
6/20/2012	10:32:21 PM	Helium MFC set to  0.000000
6/20/2012	10:32:21 PM	H2 MFC set to  0.000000
6/20/2012	10:32:21 PM	BCl3 MFC set to  0.000000
6/20/2012	10:32:21 PM	PH3 MFC set to  0.000000
6/20/2012	10:32:21 PM	SiCl4 MFC set to  0.000000
6/20/2012	10:32:21 PM	Bypass solenoid MFC set to  0.000000
6/20/2012	10:32:21 PM	Tube furnace set to 0
